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GB/T 31351-2014
GB/T 31351-2014 Nondestructive test method for micropipe density of polished monocrystalline silicon carbide wafers
Abstract
This standard specifies a non-destructive testing method for the microtube density of 4H and 6H single-crystal silicon carbide polished wafers.
This standard is applicable to the measurement of the microtube density of 4H and 6H single-crystal silicon carbide polished wafers after single-sided or double-sided polishing, where the radial size of the microtubes ranges from one micron to several tens of microns.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 31351-2014 |
| CCS | Non-destructive testing methods for metals |
| ICS | Other testing methods for metal materials |
| Implement Date | 2015-09-01 |
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