T/CSTM 00313-2021 Spectroscopic reflectance-based method for testing optical thin-film constants
T/CSTM 00313-2021 Spectroscopic reflectance-based method for testing optical thin-film constants
Basic Information
Scope
Scope: This document specifies the test method for determining the spectral characteristics of single-layer optical films by spectroscopy and using this to invert the optical constants of the film layer. This document is applicable to dielectric optical films and substrates with thicknesses ranging from 50 nm to 5000 nm. The films are composed of compounds such as oxides, fluorides, and sulfides, while the substrates are various optically transparent glasses and isotropic crystals in the visible light range. Main technical content: This document specifies the test method for determining the spectral characteristics of single-layer optical films by spectroscopy and using this to invert the optical constants of the film layer. This document is applicable to dielectric optical films and substrates with thicknesses ranging from 50 nm to 5000 nm. The films are composed of compounds such as oxides, fluorides, and sulfides, while the substrates are various optically transparent glasses and isotropic crystals in the visible light range.