GB/T 24341-2009
Active
T/XAI 16-2023
Active
Group standards
T/XAI 16-2023 Mask design specification for overlay film baseplate
T/XAI 16-2023 Mask design specification for overlay film baseplate
Price:
$ 30
Basic Information
Standard Code:
T/XAI 16-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic components
ICS Name:
Electrical and electronic engineering drawing
Publish Date:
2023-08-01
Implement Date:
2023-08-01
Scope
Scope: This document specifies the composition of the mask drawings for flip-chip thin-film substrates, exposure alignment, inspection of misalignment, drawing scaling, and engraving of text, and provides verification methods. This document is applicable to the design of mask drawings for flip-chip thin-film substrates. Main technical content: 1. Scope; 2. Normative reference documents; 3. Terms and definitions; 4. Design requirements; 5. Verification methods