T/GVS 007-2022 Active Group standards

T/GVS 007-2022 Radio Frequency Power Dynamic Resistance Test Method

Publish Date: 2022-07-11 Implement Date: 2022-07-11 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/GVS 007-2022

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Electrician

ICS Name: Electrician and electronic testing

Publish Date: 2022-07-11

Implement Date: 2022-07-11

Pages: 18 pages

Scope

Scope: This document specifies the terms and definitions, principles, test environment conditions, instrumentation, test methods, and test reports for the dynamic impedance test of radio frequency power supplies. This document is applicable to the dynamic impedance test of radio frequency power supplies with an output frequency of 0.2 MHz to 100 MHz in applications such as semiconductor etching and thin film deposition. Main technical content: It specifies the terms and definitions, principles, test environment conditions, instrumentation, test methods, and test reports for the dynamic impedance test of radio frequency power supplies. It is applicable to the dynamic impedance test of radio frequency power supplies with an output frequency of 0.2 MHz to 100 MHz in applications such as semiconductor etching and thin film deposition.