T/SICA 006-2024 Active Group standards

T/SICA 006-2024 Universal technical requirements for the transportation system of the integrated circuit wafer factory using gantry crane

Publish Date: 2024-06-07 Implement Date: 2024-07-07 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/SICA 006-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Integrated continuous handling equipment

Publish Date: 2024-06-07

Implement Date: 2024-07-07

Pages: 9 pages

Scope

Main technical content: The main technical content of this standard includes the terms and definitions of the overhead conveyor system used in integrated circuit wafer factories, abbreviations, technical requirements, environmental requirements, safety requirements, marking, packaging, transportation and storage, and delivery requirements.