GB/T 45826-2025 Active National standards

GB/T 45826-2025 Titania doped silica glass for lithography

GB/T 45826-2025 Titania doped silica glass for lithography

Publish Date: 2025-05-30 Implement Date: 2025-12-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 45826-2025

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Quartz glass

ICS Name: \nGlass products

Publish Date: 2025-05-30

Implement Date: 2025-12-01

Pages: 12 pages

Scope

This document specifies the requirements, inspection rules, and marking, packaging, transportation, and storage for titanium-doped quartz glass used in photolithography (hereinafter referred to as titanium-doped quartz glass), and describes the corresponding test methods.
This document is applicable to the production, inspection, delivery, and acceptance of titanium-doped quartz glass used in the photolithography reflective optical systems of semiconductor integrated circuits.

Development Information

Word Count: 12 Thousand words Pages: 12 pages

Referenced Standards

GB/T 191-2000 Packaging—Pictorial marking for handling of goods GB/T 191-2008 Packaging—Pictorial marking for handling of goods GB/T 5949-1986 Test method of alveolus and gas line in transparent silica glass GB/T 5949-2014 Test method for bubble and air line of transparent quartz glass GB/T 7962.7-1987 Colorless optical glass test methods Examination method for extent of stria GB/T 43881-2024 Test method for linear thermal expansion of low-expansion glass—Laser interferometry JC/T 2205-2014 Quartz glass terminology JC/T 2851-2024 JC/T 2851-2024 Optical quartz glass stress birefringence test method: Point scanning method GB/T 7962.7-2025 Test methods of colourless optical glass—Part 7:Extent of striae GB/T 191-2025 Graphical symbols marking for handling and storage of packages

Related Standards

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