GB/T 20175-2025 Active National standards

GB/T 20175-2025 Surface chemical analysis—Sputter depth profiling—Optimization using layered systems as reference materials

Publish Date: 2025-06-30 Implement Date: 2026-01-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 20175-2025

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2025-06-30

Implement Date: 2026-01-01

Pages: 24 pages

Scope

This document provides guidance and requirements for optimizing sputter depth analysis parameters using appropriate single-layer and multi-layer reference materials, in order to optimize instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry, achieving the best depth resolution.
This document does not cover the use of special multi-layer film systems (such as δ-doped layers).