GB/T 4298-1984
Abolished
T/EJCCCSE 534-2025
Active
Group standards
T/EJCCCSE 534-2025 Advanced process key component layer etching and surface treatment ultra low damage technology standard
T/EJCCCSE 534-2025 Advanced process key component layer etching and surface treatment ultra low damage technology standard
Price:
$ 20.00
Basic Information
Standard Code:
T/EJCCCSE 534-2025
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Orthopaedic surgery, orthopaedic instruments
ICS Name:
Other discrete semiconductor devices
Publish Date:
2025-08-21
Implement Date:
2025-09-20
Scope
This document specifies the terms and definitions of ultra-low damage technology for etching and surface treatment of key devices in advanced manufacturing processes, the damage requirements for different types of layer etching, the damage requirements for surface treatment, inspection methods, and ultra-low damage control. This document is applicable to quality control in the semiconductor manufacturing and microelectronic device processing processes, which use chemical and physical methods to selectively remove specific material layers (3nm node) of devices
Development Information
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