T/CIET 940-2024 Active Group standards

T/CIET 940-2024 Semiconductor thin film deposition equipment technical specification

Publish Date: 2024-12-31 Implement Date: 2024-12-31 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIET 940-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Vacuum technology

Publish Date: 2024-12-31

Implement Date: 2024-12-31

Scope

Scope: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of semiconductor thin-film deposition equipment. This document is applicable to semiconductor thin-film deposition equipment. Main technical content: This document specifies the technical requirements, test methods, inspection rules, and marking, packaging, transportation, and storage of semiconductor thin-film deposition equipment. This document is applicable to semiconductor thin-film deposition equipment.