T/CIET 1296-2025 Active Group standards

T/CIET 1296-2025 High-Purity Tantalum Target Materials for Integrated Circuits

T/CIET 1296-2025 High-purity tantalum target for integrated circuits

Publish Date: 2025-05-14 Implement Date: 2025-05-14 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIET 1296-2025

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: -

ICS Name: Other non-ferrous metal products

Publish Date: 2025-05-14

Implement Date: 2025-05-14

Scope

Scope: This document specifies the technical requirements, test methods, inspection rules, as well as marking, packaging, transportation, and storage for high-purity tantalum targets used in integrated circuits. This document applies to high-purity tantalum targets used in the physical vapor deposition (PVD) process during the manufacturing of integrated circuits. Main technical content: This document specifies the technical requirements, test methods, inspection rules, as well as marking, packaging, transportation, and storage for high-purity tantalum targets used in integrated circuits. This document applies to high-purity tantalum targets used in the physical vapor deposition (PVD) process during the manufacturing of integrated circuits.