T/CSES 122-2023 Reuse of water for industrial use and the quality of water sources for electronic grade water
T/CSES 122-2023 Reuse of water for industrial use and the quality of water sources for electronic grade water
Basic Information
Scope
Scope: This document specifies the classification and water quality requirements, treatment, safety, and detection requirements for recycled water used as a source of electronic-grade water. This document applies to recycled water used as a source of electronic-grade water, including treated effluent from urban wastewater treatment plants, wastewater from the electronics and semiconductor industries, and treated display panel industry wastewater that meets the corresponding requirements. Main technical content: The main technical content includes: classification and applications, water quality control items and their limits, treatment processes and links, safety and risk control, sampling and monitoring, etc. 5. Classification and Applications 5.1 According to water quality, recycled water is divided into three grades: EWS-1, EWS-2, and EWS-3. 5.2 When the water quality meets the relevant requirements, recycled water can be used as a source of electronic-grade water in the electronics and semiconductor industries, including display panel manufacturing. EWS-1 recycled water can also be used as a source of EWS-2 and EWS-3 electronic-grade water. EWS-2 recycled water can also be used as a source of EWS-3 electronic-grade water. 6. Water Quality Control Items and Their Limits 6.1 According to the requirements of electronic-grade water quality, the water quality control items of recycled water are divided into basic water quality control items and extended water quality control items. 6.2 Urea and trihalomethane are used as indicative water quality control items for organic matter in recycled water and are listed as basic water quality indicators. 7.1 Wastewater should undergo deep treatment such as reverse osmosis to produce recycled water. 7.2 When the treated wastewater meets the water quality requirements of Table 2 but not those of Table 3, it should undergo further advanced treatment or be mixed with conventional water resources. The recycled water produced b