T/CIECCPA 007-2024 Active Group standards

T/CIECCPA 007-2024 The emission requirements for nitrogen oxides in the semiconductor industry

Publish Date: 2024-03-04 Implement Date: 2024-03-08 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/CIECCPA 007-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Environmental protection

ICS Name: \nFixed source emission limits

Publish Date: 2024-03-04

Implement Date: 2024-03-08

Pages: 11 pages

Scope

Main technical content: This document stipulates the emission standard limits, testing requirements, and compliance assessment requirements for nitrogen oxides, an air pollutant generated during the industrial production process in the semiconductor industry.

Development Information

Pages: 11 pages

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