GB/T 44928-2024 Terms of microlithography technology for microelectronics
This document defines terms and definitions related to microelectronics lithography technology, including advanced lithography technology, micro-lithography patterning and graphics data processing technology, micro-lithography photosensitive materials, chrome plates and substrate materials, photomask technology, lithography process (exposure, etching, and micro-nano processing) technology, electron beam mask manufacturing and direct writing technology, lithography and mask quality parameter measurement and evaluation, mask manufacturing equipment, and micro-lithography equipment.
This document is applicable to teaching, scientific research, production, application, trade, and technical exchanges in the field of microelectronics lithography technology.