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GB/T 11164-2011 Active

GB/T 11164-2011 Vacuum coating plant generic specification

Available format(s)
PDF
Language(s)
Chinese
Publish Date
2011-11-21

Abstract

This standard specifies the technical requirements, test methods, inspection rules, and requirements for marking, packaging, transportation, and storage of vacuum coating equipment.
This standard applies to vacuum evaporation, sputtering, and ion plating vacuum coating equipment (hereinafter referred to as "equipment") with a pressure range of 10-5 Pa to 10-3 Pa.

General Product Information

Document Type National standards
Standard Status Active
Standard Code GB/T 11164-2011
CCS Vacuum technology and equipment
ICS Vacuum technology
Implement Date 2012-06-01
Price $ 50
Subtotal $ 50
Tax $ 0.00
Order Total (incl. tax) $ 50

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