GB/T 3163-1993
Replaced
GB/T 11164-2011
Active
National standards
GB/T 11164-2011 Vacuum coating plant generic specification
GB/T 11164-2011 Vacuum coating plant generic specification
Basic Information
Standard Code:
GB/T 11164-2011
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Vacuum technology and equipment
ICS Name:
Vacuum technology
Publish Date:
2011-11-21
Implement Date:
2012-06-01
Pages:
9 pages
Scope
This standard specifies the technical requirements, test methods, inspection rules, and requirements for marking, packaging, transportation, and storage of vacuum coating equipment.
This standard applies to vacuum evaporation, sputtering, and ion plating vacuum coating equipment (hereinafter referred to as "equipment") with a pressure range of 10-5 Pa to 10-3 Pa.
Development Information
Replace the following standards
Referenced Standards
GB/T 191-2008 Packaging—Pictorial marking for handling of goods
GB/T 3163-2007 Vacuum technology—Terminology
GB 5226.1-2008 Electrical safety of machinery—Electrical equipment of machines—Part 1:General requirements
GB/T 6070-2007 Vacuum technology—Flange dimensions
GB/T 13306-2011 Plates
GB/T 13384-2008 General specifications for packing of mechanical and electrical product
GB/T 15945-2008 Power quality—Frequency deviation for power system
GB/T 18209.1-2010 Electrical safety of machinery—Indication,marking and actuation—Part 1:Requirements for visual,acoustic and tactile signals
JB/T 7673-2011
JB/T 7673-1995
Related Standards
GB/T 3164-1993
Replaced
GB/T 3164-1993 Vacuum technology—Graphical symbols
GB/T 6070-1995
Replaced
GB/T 6070-1995 Vacuum flanges
GB/T 11164-1999
Replaced
GB/T 11164-1999 Vacuum coating plant generic specification
GB/T 18193-2000
Active
GB/T 18193-2000 Vacuum technology—Mass-spectrometer-type leak-detector calibration
GB/T 4982-2003
Replaced