T/CASAS 025-2023 Active
T/CASAS 025-2023 8-inch silicon carbide substrate reference mark and dimensions
Abstract
Scope: This document specifies the reference marks and dimensions of 8-inch silicon carbide substrates. This document is applicable to silicon carbide cutting wafers, grinding wafers, and polishing wafers. Note: Silicon carbide substrates are primarily used as epitaxial substrates for the fabrication of power electronic devices. Main technical content: This document specifies the reference marks and dimensions of 8-inch silicon carbide substrates. This document is applicable to silicon carbide cutting wafers, grinding wafers, and polishing wafers. Note: Silicon carbide substrates are mainly used as epitaxial substrates for the fabrication of power electronic devices.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/CASAS 025-2023 |
| Implement Date | 2023-06-19 |