DZ/T 0101.12-1994
Active
T/CASAS 025-2023
Active
Group standards
T/CASAS 025-2023 8-inch silicon carbide substrate reference mark and dimensions
T/CASAS 025-2023 8-inch silicon carbide substrate reference mark and dimensions
Price:
$ 20.00
Basic Information
Standard Code:
T/CASAS 025-2023
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
-
ICS Name:
-
Publish Date:
2023-06-19
Implement Date:
2023-06-19
Pages:
8 pages
Scope
Scope: This document specifies the reference marks and dimensions of 8-inch silicon carbide substrates. This document is applicable to silicon carbide cutting wafers, grinding wafers, and polishing wafers. Note: Silicon carbide substrates are primarily used as epitaxial substrates for the fabrication of power electronic devices. Main technical content: This document specifies the reference marks and dimensions of 8-inch silicon carbide substrates. This document is applicable to silicon carbide cutting wafers, grinding wafers, and polishing wafers. Note: Silicon carbide substrates are mainly used as epitaxial substrates for the fabrication of power electronic devices.
Development Information
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