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GB/T 16942-2009
GB/T 16942-2009 Gas for electronic industry—Hydrogen
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety for hydrogen used in the electronics industry. This standard applies to bottled, containerized, and piped hydrogen used in the electronics industry, which is produced by purifying hydrogen gas as a raw material. These hydrogen gases are mainly used to provide a reducing atmosphere, serve as a carrier gas for epitaxy processes, and be used as a gas supply material for plasma etching agents.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 16942-2009 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2010-05-01 |
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