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GB/T 16596-2019 Active
GB/T 16596-2019 Specification for establishing a wafer coordinate system
Abstract
This standard specifies the procedures for establishing the front-side coordinate system, back-side coordinate system, and three-dimensional coordinate system of a wafer using rectangular coordinates and polar coordinates. This standard is applicable to the establishment of coordinate systems for both patterned and non-patterned wafers. This coordinate system is used to determine and record the accurate locations of test results such as defects and particles on the wafer.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 16596-2019 |
| CCS | Semi-metals and semiconductor materials |
| ICS | Semiconductor materials |
| Implement Date | 2020-02-01 |
Price
$ 42
Subtotal
$ 42
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$ 0.00
Order Total (incl. tax)
$ 42