GB/T 11093-1989
Replaced
GB/T 16596-2019
Active
National standards
GB/T 16596-2019 Specification for establishing a wafer coordinate system
GB/T 16596-2019 Specification for establishing a wafer coordinate system
Price:
$ 42
Basic Information
Standard Code:
GB/T 16596-2019
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2019-03-25
Implement Date:
2020-02-01
Pages:
5 pages
Scope
This standard specifies the procedures for establishing the front-side coordinate system, back-side coordinate system, and three-dimensional coordinate system of a wafer using rectangular coordinates and polar coordinates. This standard is applicable to the establishment of coordinate systems for both patterned and non-patterned wafers. This coordinate system is used to determine and record the accurate locations of test results such as defects and particles on the wafer.
Development Information
Replace the following standards
Referenced Standards
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced