GB/T 11093-1989
Replaced
GB/T 16596-2019
Active
National standards
GB/T 16596-2019 Specification for establishing a wafer coordinate system
GB/T 16596-2019 Specification for establishing a wafer coordinate system
Basic Information
Standard Code:
GB/T 16596-2019
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Semi-metals and semiconductor materials
ICS Name:
Semiconductor materials
Publish Date:
2019-03-25
Implement Date:
2020-02-01
Publisher:
国家市场监督管理总局、中国国家标准化管理委员会
Technical Committee:
全国半导体设备和材料标准化技术委员会(SAC/TC 203)、全国半导体设备和材料标准化技术委员会材料分技术委员会(SAC/TC 203/SC 2)
Pages:
5 pages
Scope
本标准规定了使用直角坐标和极坐标建立晶片正面坐标系、背面坐标系和三维坐标系的程序。本标准适用于有图形和无图形的晶片坐标系的建立。该坐标系用于确定和记录晶片上的缺陷、颗粒等测试结果的准确位置。
Development Information
Drafting Units:
有色金属技术经济研究院、有研半导体材料有限公司、浙江海纳半导体有限公司、浙江省硅材料质量检验中心、上海合晶硅材料有限公司
Drafting Persons:
卢立延、孙燕、潘金平、杨素心、楼春兰、胡金枝、李素青
Replace the following standards
Referenced Standards
Related Standards
GB/T 13388-1992
Replaced
GB/T 13388-1992 Method for measuring crystallographic orientation of flats on single crystal silicon slices and wafers by X-ray techniques
GB/T 13389-1992
Replaced
GB/T 13389-1992 Practice for conversion between resistivity and dopant density for boron-doped and phosphorus-doped silicon
GB/T 13843-1992
Abolished
GB/T 13843-1992 Polished monocrystalline sapphire substrates
GB/T 14015-1992
Active
GB/T 14015-1992 Silicon on sapphire epitaxial wafers
GB/T 14139-1993
Replaced