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GB/T 17874-2010
GB/T 17874-2010 Gases for electronic industry-Boron trichloride
Abstract
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of boron trichloride.
This standard applies to boron trichloride purified from crude boron trichloride using methods such as adsorption and distillation, and is mainly used in processes such as diffusion, ion implantation, and dry etching in the production of semiconductor devices.
Molecular formula: BCl3.
Relative molecular mass: 117.1691 (calculated based on the 2007 International Atomic Mass Table).
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 17874-2010 |
| CCS | Industrial gases and chemical gases |
| ICS | Industrial gases |
| Implement Date | 2011-05-01 |
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