GB 4962-1985
Replaced
GB/T 17874-2010
Replaced
National standards
GB/T 17874-2010 Gases for electronic industry-Boron trichloride
GB/T 17874-2010 Gases for electronic industry-Boron trichloride
Basic Information
Standard Code:
GB/T 17874-2010
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Industrial gases and chemical gases
ICS Name:
Industrial gases
Publish Date:
2011-01-14
Implement Date:
2011-05-01
Pages:
7 pages
Scope
This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of boron trichloride.
This standard applies to boron trichloride purified from crude boron trichloride using methods such as adsorption and distillation, and is mainly used in processes such as diffusion, ion implantation, and dry etching in the production of semiconductor devices.
Molecular formula: BCl3.
Relative molecular mass: 117.1691 (calculated based on the 2007 International Atomic Mass Table).
Development Information
Replace the following standards
Superseded by the following standards
Referenced Standards
《气瓶安全监察规程》(国家质量监督检验检疫总局发布
2000年)
GB 190-1990 Labels for packages of dangerous goods
GB 190-2009 Packing symbol of dangerous goods
GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling
GB/T 5099-1994 Seamless steel gas cylinders
GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa
GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders
GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders
GB 7144-1999 Colored cylinder mark for gases
GB/T 7144-2016 Coloured cylinder mark for gases
GB/T 8984-2008 Determination of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method
GB/T 8984.1-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 1:Determination of carbon monoxide,carbon dioxide and mathane in the gases—Gas chromatographic method
GB/T 8984.2-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 2:Determination of total content of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method
GB/T 8984.3-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 3:Determination of total hydrocarbon in gases—Flame ionization method
GB 14193-1993 Rules for filling of liquefied gas cylinders
GB/T 14193-2009 Rules for filling of liquefied gas cylinders
GB/T 26571-2011 Specification for the shelf life of a specialty gas
GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder
GB/T 8984-2025 Gas analysis—Determination of the contents of trace carbon monoxide, carbon dioxide and hydrocarbon in gases—Gas chromatography with flame ionization detector
Related Standards
GB/T 8981-1988
Replaced
GB/T 8981-1988 Determination of trace hydrogen in gases—Gas chromatographic method
GB/T 10627-1989
Replaced
GB/T 10627-1989 Gas analysis—Preparation of calibration gas mixtures—Static volumetric methods
GB/T 10628-1989
Replaced
GB/T 10628-1989 Gas analysis—Determination of composition of calibration gas mixtures—Comparison methods
GB 13548-1992
Replaced
GB 13548-1992 General principle of safety assessment for phosgene and its products plant
GB 13591-1992
Replaced