GB/T 17874-2010 Replaced National standards

GB/T 17874-2010 Gases for electronic industry-Boron trichloride

GB/T 17874-2010 Gases for electronic industry-Boron trichloride

Publish Date: 2011-01-14 Implement Date: 2011-05-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 17874-2010
Standard Type: National standards
Standard Status: Replaced
is_force_gb: no
CCS Name: Industrial gases and chemical gases
ICS Name: Industrial gases
Publish Date: 2011-01-14
Implement Date: 2011-05-01
Pages: 7 pages

Scope

This standard specifies the technical requirements, test methods, and packaging, marking, storage, transportation, and safety of boron trichloride.
This standard applies to boron trichloride purified from crude boron trichloride using methods such as adsorption and distillation, and is mainly used in processes such as diffusion, ion implantation, and dry etching in the production of semiconductor devices.
Molecular formula: BCl3.
Relative molecular mass: 117.1691 (calculated based on the 2007 International Atomic Mass Table).

Development Information

Word Count: 11 Thousand words Pages: 7 pages

Replace the following standards

Superseded by the following standards

Referenced Standards

《气瓶安全监察规程》(国家质量监督检验检疫总局发布 2000年) GB 190-1990 Labels for packages of dangerous goods GB 190-2009 Packing symbol of dangerous goods GB/T 3723-1999 Sampling of chemical products for industrial use—Safety in sampling GB/T 5099-1994 Seamless steel gas cylinders GB/T 5099.1-2017 Seamless steel gas cylinders—Part 1:Quenched and tempered steel cylinders with tensile strength less than 1 100 MPa GB/T 5099.3-2017 Seamless steel gas cylinders—Part 3:Normalized cylinders GB/T 5099.4-2017 Seamless steel gas cylinders—Part 4:Seamless stainless steel gas cylinders GB 7144-1999 Colored cylinder mark for gases GB/T 7144-2016 Coloured cylinder mark for gases GB/T 8984-2008 Determination of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method GB/T 8984.1-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 1:Determination of carbon monoxide,carbon dioxide and mathane in the gases—Gas chromatographic method GB/T 8984.2-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 2:Determination of total content of carbon monoxide,carbon dioxide and hydrocarbon in gases—Gas chromatographic method GB/T 8984.3-1997 Determination of carbon monoxide,carbon dioxide and hydrocarbon in the gases—Part 3:Determination of total hydrocarbon in gases—Flame ionization method GB 14193-1993 Rules for filling of liquefied gas cylinders GB/T 14193-2009 Rules for filling of liquefied gas cylinders GB/T 26571-2011 Specification for the shelf life of a specialty gas GB/T 14193.1-2025 Rules for the filling of liquefied gas cylinders—Part1:Industrial gas cylinder GB/T 8984-2025 Gas analysis—Determination of the contents of trace carbon monoxide, carbon dioxide and hydrocarbon in gases—Gas chromatography with flame ionization detector

Related Standards

Contact Us