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GB/T 33826-2017 Active
GB/T 33826-2017 Measurement of nanofilm thickness on glass substrate —Profilometric method
Abstract
This standard specifies the principle, instrument requirements, test environment, requirements, steps, and test reports for measuring the thickness of nanometer-thick films on glass substrates using a stylus profiler. This standard is applicable to the measurement of nanometer-thick films on glass substrates with a thickness range of 10 nm to 1,000 nm, where a step exists or can be etched between the film and the substrate. Other hard flat substrates can refer to this standard for implementation.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 33826-2017 |
| CCS | Industrial technology glass |
| ICS | Other standards related to analytical chemistry |
| Implement Date | 2017-12-01 |
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