MT/T 707-1997
Active
GB/T 33826-2017
Active
National standards
GB/T 33826-2017 Measurement of nanofilm thickness on glass substrate —Profilometric method
GB/T 33826-2017 Measurement of nanofilm thickness on glass substrate —Profilometric method
Basic Information
Standard Code:
GB/T 33826-2017
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Industrial technology glass
ICS Name:
Other standards related to analytical chemistry
Publish Date:
2017-05-31
Implement Date:
2017-12-01
Pages:
14 pages
Scope
This standard specifies the principle, instrument requirements, test environment, requirements, steps, and test reports for measuring the thickness of nanometer-thick films on glass substrates using a stylus profiler. This standard is applicable to the measurement of nanometer-thick films on glass substrates with a thickness range of 10 nm to 1,000 nm, where a step exists or can be etched between the film and the substrate. Other hard flat substrates can refer to this standard for implementation.
Development Information
Referenced Standards
Related Standards
GB/T 20724-2006
Replaced
GB/T 20724-2006 Method of thickness measurement for thin crystal by convergent beam electron diffraction
GB/T 20725-2006
Active
GB/T 20725-2006 Electron probe microanalysis guidelines for qualitative point analysis by wavelength dispersive X-ray spectrometry
GB/T 20726-2006
Replaced
GB/T 20726-2006 Instrumental specification for energy dispersive X-ray spectrometers with semiconductor detectors
LY/T 1082-2008
Replaced
LY/T 1082-2008 Test method for analysis of vegetable tannin extracts
LY/T 1083-2008
Replaced