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YS/T 987-2014
YS/T 987-2014 Test method for measuring carbon containing compound in chlorosilane—Determination of methyldichlorosilane
Abstract
This standard specifies the determination method of carbon impurities in chlorosilane, mainly including the determination of methyl dichlorosilane in trichlorosilane and the determination of methyl dichlorosilane in tetrachlorosilane.
This standard is applicable to the determination of methyl dichlorosilane in trichlorosilane and the determination of methyl dichlorosilane in tetrachlorosilane. The detection range of methyl dichlorosilane in trichlorosilane and tetrachlorosilane is 0.000 01% to 1.00%.
General Product Information
| Document Type | Industry standards-Non-ferrous metals |
|---|---|
| Standard Status | Replaced |
| Standard Code | YS/T 987-2014 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | Chemical analysis of metal materials |
| Implement Date | 2015-04-01 |
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