GB/T 2596-1981
Abolished
YS/T 987-2014
Replaced
Industry standards-Non-ferrous metals
YS/T 987-2014 Test method for measuring carbon containing compound in chlorosilane—Determination of methyldichlorosilane
YS/T 987-2014 Test method for measuring carbon containing compound in chlorosilane—Determination of methyldichlorosilane
Basic Information
Standard Code:
YS/T 987-2014
Standard Type:
Industry standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
Chemical analysis of metal materials
Publish Date:
2014-10-14
Implement Date:
2015-04-01
Pages:
8 pages
Scope
This standard specifies the determination method of carbon impurities in chlorosilane, mainly including the determination of methyl dichlorosilane in trichlorosilane and the determination of methyl dichlorosilane in tetrachlorosilane.
This standard is applicable to the determination of methyl dichlorosilane in trichlorosilane and the determination of methyl dichlorosilane in tetrachlorosilane. The detection range of methyl dichlorosilane in trichlorosilane and tetrachlorosilane is 0.000 01% to 1.00%.
Development Information
Superseded by the following standards
Referenced Standards
Related Standards
GB/T 3249-1982
Replaced
GB/T 3249-1982 Standard method for determination of particle size of powders of refractory metals and compounds—Fisher method
GB/T 3488-1983
Replaced
GB/T 3488-1983 Hardmetals—metallographic determination of microstructure
GB/T 3489-1983
Replaced
GB/T 3489-1983 Hardmetals—Metallographic determination of porosity and uncombined carbon
GB/T 3651-1983
Replaced
GB/T 3651-1983 Measuring method for thermal conductivity of metal at high temperature
GB/T 4059-1983
Replaced