GB/T 34972-2017 Active
GB/T 34972-2017 Determination of metal content in gases—Inductively coupled plasma mass spectrometry method
Abstract
This standard specifies the method for determining the content of metal elements in gases used in the electronics industry using inductively coupled plasma mass spectrometers. The range of metal element determination is shown in Table 1. The types of gases used in the electronics industry that this standard applies to include: oxygen, nitrogen, argon, helium, hydrogen, ammonia, hydrogen chloride, silane, high-purity chlorine, sulfur hexafluoride, boron trichloride, nitrogen trifluoride, nitrous oxide, hexafluoroethane, hexafluoropropadiene, etc. The sampling state of the gases used in the electronics industry that this standard applies to is gaseous.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 34972-2017 |
| CCS | Industrial gases and chemical gases |
| ICS | Chemical analysis |
| Implement Date | 2018-02-01 |