GB/T 34972-2017 Active National standards

GB/T 34972-2017 Determination of metal content in gases—Inductively coupled plasma mass spectrometry method

Publish Date: 2017-11-01 Implement Date: 2018-02-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 34972-2017

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Industrial gases and chemical gases

ICS Name: Chemical analysis

Publish Date: 2017-11-01

Implement Date: 2018-02-01

Pages: 9 pages

Scope

This standard specifies the method for determining the content of metal elements in gases used in the electronics industry using inductively coupled plasma mass spectrometers. The range of metal element determination is shown in Table 1. The types of gases used in the electronics industry that this standard applies to include: oxygen, nitrogen, argon, helium, hydrogen, ammonia, hydrogen chloride, silane, high-purity chlorine, sulfur hexafluoride, boron trichloride, nitrogen trifluoride, nitrous oxide, hexafluoroethane, hexafluoropropadiene, etc. The sampling state of the gases used in the electronics industry that this standard applies to is gaseous.