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GB/T 15861-2012 Active
GB/T 15861-2012 General specification of ion beam etching system
Abstract
This standard specifies the terminology, product classification, technical requirements, test methods, inspection rules, and packaging, transportation, and storage for ion beam etching machines.
This standard applies to general ion beam etching machines with physical sputtering etching functions. Other specialized ion beam etching machines can also be implemented in accordance with this standard.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 15861-2012 |
| CCS | Special processing equipment |
| ICS | Electronic product production equipment |
| Implement Date | 2013-02-15 |
Price
$ 54
Subtotal
$ 54
Tax
$ 0.00
Order Total (incl. tax)
$ 54