GB/T 15861-2012 Active National standards

GB/T 15861-2012 General specification of ion beam etching system

GB/T 15861-2012 General specification of ion beam etching system

Publish Date: 2012-11-05 Implement Date: 2013-02-15 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: GB/T 15861-2012

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Special processing equipment

ICS Name: Electronic product production equipment

Publish Date: 2012-11-05

Implement Date: 2013-02-15

Pages: 11 pages

Scope

This standard specifies the terminology, product classification, technical requirements, test methods, inspection rules, and packaging, transportation, and storage for ion beam etching machines.
This standard applies to general ion beam etching machines with physical sputtering etching functions. Other specialized ion beam etching machines can also be implemented in accordance with this standard.

Development Information

Word Count: 20 Thousand words Pages: 11 pages

Replace the following standards

GB/T 15861-1995 Generic specification of ion beam etching system

Referenced Standards

GB/T 4857.7-2005 Packaging—Basic tests for transport packages—Part 7:Sinusoidal vibration test method at constant frequency GB/T 5080.7-1986 Equipment reliability testing Compliance test plans for failure rate and mean time between failures assuming constant failure rate GB/T 6388-1986 Transport package shipping mark GB/T 13384-1992 General specifications for packagings of mechanical and electrical products SJ/T 1276 GB/T 191-2000 Packaging—Pictorial marking for handling of goods GB/T 191-2008 Packaging—Pictorial marking for handling of goods SJ/T 142-1996 Electronic Industry Special Equipment General Specification SJ/T 10674-1995 Paint coating General technical specification GB/T 191-2025 Graphical symbols marking for handling and storage of packages

Related Standards

GB/T 15862-2012 Active

GB/T 15862-2012 General specification of ion implantation equipment

Publish Date: 2012-11-05

GB/T 29845-2013 Active

GB/T 29845-2013 Guide for final assembly,packaging,transportation, unpacking,and relocation of semiconductor manufacturing equipment

Publish Date: 2013-11-12

GB/T 30116-2013 Active

GB/T 30116-2013 Requirements for semiconductor manufacturing facility electromagnetic compatibility

Publish Date: 2013-12-17

GB/T 37466-2019 Active

GB/T 37466-2019 Laser lift-off equipment used for GaN

Publish Date: 2019-06-04

DB44/T 1668-2015 Abolished

DB44/T 1668-2015 Li-ion battery continuous welding machine

Publish Date: 2015-09-07

DB44/T 1667-2015 Abolished

DB44/T 1667-2015 Li-ion battery automatic stacker

Publish Date: 2015-09-07