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GB/T 11073-2007
GB/T 11073-2007 Standard method for measuring radial resistivity variation on silicon slices
Abstract
This standard specifies the method of measuring the radial resistivity variation of silicon single wafers using the direct four-probe method. This standard is applicable to the measurement of the radial resistivity variation of silicon single wafers with a thickness less than the average probe spacing, a diameter greater than 15 mm, and a resistivity ranging from 1×10−3 Ω·cm to 3×103 Ω·cm.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 11073-2007 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | Comprehensive Testing of Metal Materials |
| Implement Date | 2008-02-01 |
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