GB/T 14140.1-1993
Replaced
GB/T 11073-2007
Replaced
National standards
GB/T 11073-2007 Standard method for measuring radial resistivity variation on silicon slices
GB/T 11073-2007 Standard method for measuring radial resistivity variation on silicon slices
Basic Information
Standard Code:
GB/T 11073-2007
Standard Type:
National standards
Standard Status:
Replaced
is_force_gb:
no
CCS Name:
Analysis methods for semi-metallic and semiconductor materials
ICS Name:
Comprehensive Testing of Metal Materials
Publish Date:
2007-09-11
Implement Date:
2008-02-01
Pages:
16 pages
Scope
This standard specifies the method of measuring the radial resistivity variation of silicon single wafers using the direct four-probe method. This standard is applicable to the measurement of the radial resistivity variation of silicon single wafers with a thickness less than the average probe spacing, a diameter greater than 15 mm, and a resistivity ranging from 1×10−3 Ω·cm to 3×103 Ω·cm.
Development Information
Replace the following standards
Superseded by the following standards
Referenced Standards
GB/T 6618-1995 Test method for thickness and total thickness variation of silicon slices
GB/T 1552-1995 Test method for measuring resistivity of monocrystal silicon and germanium with a collinear four-probe array
GB/T 2828.1-2003 Sampling procedures for inspection by attributes—Part 1:Sampling schemes indexed by acceptance quality limit(AQL) for lot-by-lot inspection
GB/T 2828.1-2012 Sampling procedures for inspection by attributes—Part 1:Sampling schemes indexed by acceptance quality limit(AQL) for lot-by-lot inspection
GB/T 2828.2-2008 Sampling procedures for inspection by attributes—Part 2:Sampling plans indexed by limiting quality(LQ)for isolated lot inspection
GB/T 2828.3-2008 Sampling procedures for inspection by attributes—Part 3:Skip-lot sampling procedures
GB/T 2828.4-2008 Sampling procedures for inspection by attributes—Part 4:Procedures for assessment of declared quality levels
GB/T 2828.5-2011 Sampling procedures for inspection by attributes—Part 5:System of sequential sampling plans indexed by acceptance quality limit(AQL)for lot-by-lot inspection
GB/T 2828.10-2010 Sampling procedures for inspection by attributes—Part 10:Introduction to the GB/T 2828 series of standards for sampling for inspection by attributes
GB/T 2828.11-2008 Sampling procedures for inspection by attributes—Part 11:Procedures for assessment of declared quality levels for small population
GB/T 12965-1996 Monocrystalline silicon as cut slices and lapped slices
GB/T 12965-2005 Monocrystalline silicon as cut slices and lapped slices
GB/T 12965-2018 Monocrystalline silicon as cut wafers and lapped wafers
Adopt standards
ASTM F 81-1901
Related Standards
GB/T 14140.2-1993
Replaced
GB/T 14140.2-1993 Silicon slices and wafers—Measuring of diameter—Micrometer method
GB/T 15615-1995
Abolished
GB/T 15615-1995 Test method for measuring flexure strength of silicon slices
GB/T 16481-1996
Abolished
GB/T 16481-1996 Standard spectrum tables of microwave plasma torch-atomic emitting spectrum of rare earth
GB/T 1550-1997
Replaced
GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials
GB/T 1553-1997
Replaced