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GB/T 31227-2014 Active
GB/T 31227-2014 Test method for the surface roughness by atomic force microscope for sputtered thin films
Abstract
This standard specifies the method of measuring surface roughness using an atomic force microscope (AFM).
This standard is applicable to the measurement of thin films generated by the sputtering deposition method, with an average roughness Ra less than 100 nm.
For the measurement of surface roughness of other non-sputtered thin films, this method can be used as a reference.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 31227-2014 |
| CCS | Basic standards and general methods |
| ICS | \nSurface features |
| Implement Date | 2015-04-15 |
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