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GB/T 20175-2006 Active
GB/T 20175-2006 Surface chemical analysis—Sputter depth profiling—Optimization using layered system as reference materials
Abstract
In order to set the instruments for Auger electron spectroscopy, X-ray photoelectron spectroscopy, and secondary ion mass spectrometry to achieve the goal of depth resolution optimization, this standard uses appropriate single-layer and multi-layer film systems as reference materials to provide guidelines for optimizing the parameters of sputtering depth profiling. The use of special multi-layer film systems (such as various doped layer film systems) is not included in this standard.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 20175-2006 |
| CCS | Electronic optics and other physical optical instruments |
| ICS | Chemical analysis |
| Implement Date | 2006-11-01 |
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$ 57