T/ZSA 224-2024 Active
T/ZSA 224-2024 Semiconductor equipment front-end module
Abstract
Scope: This document specifies the structure and classification of front-end modules for semiconductor equipment, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document applies to front-end modules for semiconductor equipment used with 100 mm, 125 mm, 150 mm, 200 mm, and 300 mm wafers. Front-end modules for semiconductor equipment used with wafers of other specifications may be implemented with reference to this document. Main technical content: This document specifies the structure and classification of front-end modules for semiconductor equipment, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document applies to front-end modules for semiconductor equipment used with 100 mm, 125 mm, 150 mm, 200 mm, and 300 mm wafers. Front-end modules for semiconductor equipment used with wafers of other specifications may be implemented with reference to this document.
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/ZSA 224-2024 |
| CCS | Electronic components and information technology |
| Implement Date | 2024-04-13 |