DZ/T 0101.12-1994
Active
T/ZSA 224-2024
Active
Group standards
T/ZSA 224-2024 Semiconductor equipment front-end module
T/ZSA 224-2024 Semiconductor equipment front-end module
Price:
$ 20.00
Basic Information
Standard Code:
T/ZSA 224-2024
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Electronic components and information technology
ICS Name:
-
Publish Date:
2024-04-12
Implement Date:
2024-04-13
Pages:
14 pages
Scope
Scope: This document specifies the structure and classification of front-end modules for semiconductor equipment, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document applies to front-end modules for semiconductor equipment used with 100 mm, 125 mm, 150 mm, 200 mm, and 300 mm wafers. Front-end modules for semiconductor equipment used with wafers of other specifications may be implemented with reference to this document. Main technical content: This document specifies the structure and classification of front-end modules for semiconductor equipment, technical requirements, test methods, inspection rules, marking, packaging, transportation, and storage. This document applies to front-end modules for semiconductor equipment used with 100 mm, 125 mm, 150 mm, 200 mm, and 300 mm wafers. Front-end modules for semiconductor equipment used with wafers of other specifications may be implemented with reference to this document.
Development Information
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