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GB/T 32189-2015 Active
GB/T 32189-2015 Test method for surface roughness of GaN single crystal substrate by atomic force microscope
Abstract
This standard specifies the method of testing the surface roughness of gallium nitride single-crystal substrates using atomic force microscopy. This standard is applicable to gallium nitride single-crystal substrates with a surface roughness of less than 10 nm, which are grown by chemical vapor deposition and other methods. For other semiconductor single-crystal substrates with similar surface structures, before testing using the method provided in this standard, both parties involved in the testing need to reach an agreement through consultation.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 32189-2015 |
| CCS | \nTest methods for the physical properties of metals |
| ICS | \nMetal material testing |
| Implement Date | 2016-11-01 |
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