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GB/T 32817-2016 Active
GB/T 32817-2016 Semiconductor devices—Micro-electromechanical devices—Generic specification for MEMS
Abstract
This standard describes the general specifications for microelectromechanical systems (MEMS) manufactured using semiconductors, sets forth the general procedures for quality assessment in the IECQ CECC system, and provides guidelines for the description and testing of electrical, optical, mechanical, and environmental characteristics. This standard applies to all types of MEMS devices, such as sensors and radio frequency MEMS, but excludes optical MEMS, biological MEMS, micro total analysis systems (MicroTAS), and micro energy MEMS.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 32817-2016 |
| CCS | Microcircuit |
| ICS | Other discrete semiconductor devices |
| Implement Date | 2017-03-01 |
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$ 75
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$ 75
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$ 75