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GB/T 26111-2010
GB/T 26111-2010 Micro-electromechanical system technology—Terms
Abstract
This standard specifies the general terms and definitions related to materials, design, processing, packaging, measurement, and devices in the field of microelectromechanical systems (MEMS).
This standard is applicable to research, development, evaluation, and application in the field of MEMS.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 26111-2010 |
| CCS | Microcircuit |
| ICS | Integrated circuits, microelectronics |
| Implement Date | 2011-10-01 |
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