PDF
YS/T 983-2014
YS/T 983-2014 Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas
Abstract
This standard specifies the method for determining the gas composition of the exhaust gas from polysilicon reduction furnaces and hydrogenation furnaces.
This standard is applicable to the determination of the gas composition (hydrogen, hydrogen chloride, trichlorosilane, dichlorodihydrogensilane, and silicon tetrachloride) in the exhaust gas from reduction furnaces and hydrogenation furnaces using the modified Siemens process. The detection range is 0.1% to 100% by volume fraction.
General Product Information
| Document Type | Industry standards-Non-ferrous metals |
|---|---|
| Standard Status | Abolished |
| Standard Code | YS/T 983-2014 |
| CCS | Analysis methods for semi-metallic and semiconductor materials |
| ICS | \nMetal material testing |
| Implement Date | 2015-04-01 |
Price
$ 14.00
Subtotal
$ 14.00
Tax
$ 0.00
Order Total (incl. tax)
$ 14.00