YS/T 983-2014 Abolished Industry standards-Non-ferrous metals

YS/T 983-2014 Test method for measuring composition of polysilicon deposition reactor and TCS to STC converter vent gas

Publish Date: 2014-10-14 Implement Date: 2015-04-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

Basic Information

Standard Code: YS/T 983-2014

Standard Type: Industry standards

Standard Status: Abolished

is_force_gb: no

CCS Name: Analysis methods for semi-metallic and semiconductor materials

ICS Name: \nMetal material testing

Publish Date: 2014-10-14

Implement Date: 2015-04-01

Pages: 8 pages

Scope

This standard specifies the method for determining the gas composition of the exhaust gas from polysilicon reduction furnaces and hydrogenation furnaces.
This standard is applicable to the determination of the gas composition (hydrogen, hydrogen chloride, trichlorosilane, dichlorodihydrogensilane, and silicon tetrachloride) in the exhaust gas from reduction furnaces and hydrogenation furnaces using the modified Siemens process. The detection range is 0.1% to 100% by volume fraction.