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T/ZJCX 0043-2024 Active
T/ZJCX 0043-2024 Plasma-enhanced chemical vapor deposition equipment with graphite boats
Abstract
Main technical content: This document specifies the terms and definitions, structure and classification, technical requirements, inspection methods, inspection rules, marking, packaging, transportation, and storage of graphite boats used in plasma enhanced chemical vapor deposition equipment in the photovoltaic field (referred to as graphite boats). This document is applicable to graphite boats used in plasma enhanced chemical vapor deposition equipment (PECVD).
General Product Information
| Document Type | Group standards |
|---|---|
| Standard Status | Active |
| Standard Code | T/ZJCX 0043-2024 |
| CCS | Building materials |
| ICS | Semiconductor materials |
| Implement Date | 2024-07-24 |
Price
$ 20.00
Subtotal
$ 20.00
Tax
$ 0.00
Order Total (incl. tax)
$ 20.00