T/ZJCX 0043-2024 Active Group standards

T/ZJCX 0043-2024 Plasma-enhanced chemical vapor deposition equipment with graphite boats

Publish Date: 2024-07-23 Implement Date: 2024-07-24 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: T/ZJCX 0043-2024

Standard Type: Group standards

Standard Status: Active

is_force_gb: no

CCS Name: Building materials

ICS Name: Semiconductor materials

Publish Date: 2024-07-23

Implement Date: 2024-07-24

Pages: 12 pages

Scope

Main technical content: This document specifies the terms and definitions, structure and classification, technical requirements, inspection methods, inspection rules, marking, packaging, transportation, and storage of graphite boats used in plasma enhanced chemical vapor deposition equipment in the photovoltaic field (referred to as graphite boats). This document is applicable to graphite boats used in plasma enhanced chemical vapor deposition equipment (PECVD).