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GB/T 23414-2009
GB/T 23414-2009 Microbeam analysis—Scanning electron microscopy—Vocabulary
Abstract
This standard defines the terms used in scanning electron microscopy (SEM) practice. It includes general terms and terms for specific concepts classified by technology, as well as terms already defined in ISO 23833.
This standard applies to all standardized documents related to SEM practice. In addition, some of the term definitions in this standard also apply to documents in related fields [for example: electron probe microanalysis (EPMA), analytical electron microscopy (AEM), energy dispersive X-ray spectrometry (EDX), etc.].
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Replaced |
| Standard Code | GB/T 23414-2009 |
| CCS | Electronic optics and other physical optical instruments |
| ICS | Imaging technology (vocabulary) |
| Implement Date | 2009-12-01 |
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