PDF
GB/T 15862-2012 Active
GB/T 15862-2012 General specification of ion implantation equipment
Abstract
This standard specifies the terminology, product classification, technical requirements, testing, inspection rules, marking, packaging, transportation, and storage of ion implantation machines.
This standard applies to electric ion implantation machines used in semiconductor processing. Other ion implantation machines can also be used as a reference for application.
General Product Information
| Document Type | National standards |
|---|---|
| Standard Status | Active |
| Standard Code | GB/T 15862-2012 |
| CCS | Special processing equipment |
| ICS | Electronic product production equipment |
| Implement Date | 2013-02-15 |
Price
$ 54
Subtotal
$ 54
Tax
$ 0.00
Order Total (incl. tax)
$ 54