GB/T 15861-2012
Active
GB/T 15862-2012
Active
National standards
GB/T 15862-2012 General specification of ion implantation equipment
GB/T 15862-2012 General specification of ion implantation equipment
Basic Information
Standard Code:
GB/T 15862-2012
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Special processing equipment
ICS Name:
Electronic product production equipment
Publish Date:
2012-11-05
Implement Date:
2013-02-15
Pages:
11 pages
Scope
This standard specifies the terminology, product classification, technical requirements, testing, inspection rules, marking, packaging, transportation, and storage of ion implantation machines.
This standard applies to electric ion implantation machines used in semiconductor processing. Other ion implantation machines can also be used as a reference for application.
Development Information
Replace the following standards
Referenced Standards
GB/T 4857.7-2005 Packaging—Basic tests for transport packages—Part 7:Sinusoidal vibration test method at constant frequency
GB/T 5080.7-1986 Equipment reliability testing Compliance test plans for failure rate and mean time between failures assuming constant failure rate
GB/T 6388-1986 Transport package shipping mark
GB/T 13384-1992 General specifications for packagings of mechanical and electrical products
SJ/T 1276
GB/T 191-2000 Packaging—Pictorial marking for handling of goods
GB/T 191-2008 Packaging—Pictorial marking for handling of goods
GB 18209.1-2000 Safety of machinery—Indication, marking and actuation—Part 1:Requirements for visual, auditory and tactile signals
GB/T 18209.1-2010 Electrical safety of machinery—Indication,marking and actuation—Part 1:Requirements for visual,acoustic and tactile signals
SJ/T 142-1996 Electronic Industry Special Equipment General Specification
SJ/T 10674-1995 Paint coating General technical specification
GB/T 191-2025 Graphical symbols marking for handling and storage of packages
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