GB/T 4298-1984
Abolished
GB/T 44515-2024
Active
National standards
GB/T 44515-2024 Micro-electromechanical system(MEMS) technology—Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
GB/T 44515-2024 Micro-electromechanical system(MEMS) technology—Measurement methods of electro-mechanical conversion characteristics of MEMS piezoelectric thin film
Price:
$ 66
Basic Information
Standard Code:
GB/T 44515-2024
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Micro-components
ICS Name:
Other discrete semiconductor devices
Publish Date:
2024-09-29
Implement Date:
2025-01-01
Pages:
20 pages
Scope
This document describes the method of measuring the electromechanical conversion characteristics of piezoelectric thin films used in devices such as piezoelectric micro-sensors and micro-actuators.
This document is applicable to piezoelectric thin films prepared by MEMS processes.
Development Information
Adopt standards
IEC 62047-30:2017
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