GB/T 14140.1-1993
Replaced
T/CNIA 0064-2020
Active
Group standards
T/CNIA 0064-2020 Determination of Impurity Content in Durable Silicon Wipes for the Polysilicon Industry Using Inductively Coupled Plasma Atomic Emission Spectroscopy (ICP-AES)
T/CNIA 0064-2020 Determination of Impurity Content in Durable Silicon Wipes for the Polysilicon Industry Using Inductively Coupled Plasma Atomic Emission Spectroscopy (ICP-AES)
Price:
$ 20.00
Basic Information
Standard Code:
T/CNIA 0064-2020
Standard Type:
Group standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
Metal chemical analysis methods
ICS Name:
Comprehensive Testing of Metal Materials
Publish Date:
2020-05-27
Implement Date:
2020-08-01
Scope
Main technical content: This standard specifies the determination method for the impurity content of boron, phosphorus, sodium, magnesium, potassium, calcium, chromium, iron, nickel, copper, and zinc in dust-free wiping cloths used in the polysilicon industry. This standard is applicable to the determination of the impurity content of boron, phosphorus, sodium, magnesium, potassium, calcium, chromium, iron, nickel, copper, and zinc in dust-free wiping cloths used in the polysilicon industry, with a measurement range of 0.10 μg/g to 10.00 μg/g.
Development Information
Related Standards
GB/T 14140.2-1993
Replaced
GB/T 14140.2-1993 Silicon slices and wafers—Measuring of diameter—Micrometer method
GB/T 15615-1995
Abolished
GB/T 15615-1995 Test method for measuring flexure strength of silicon slices
GB/T 16481-1996
Abolished
GB/T 16481-1996 Standard spectrum tables of microwave plasma torch-atomic emitting spectrum of rare earth
GB/T 1550-1997
Replaced
GB/T 1550-1997 Standard methods for measuring conductivity type of extrinsic semiconducting materials
GB/T 1553-1997
Replaced