GB/T 34326-2026 Active National standards

GB/T 34326-2026 Surface chemical analysis—Depth profiling—Methods for ion beam alignment and the associated measurement of current or current density for depth profiling in AES and XPS

Publish Date: 2026-01-28 Implement Date: 2026-08-01 For services related to genuine standard inquiry, procurement, translation, and other related services in China, please Contact Us

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Basic Information

Standard Code: GB/T 34326-2026

Standard Type: National standards

Standard Status: Active

is_force_gb: no

CCS Name: Basic standards and general methods

ICS Name: Chemical analysis

Publish Date: 2026-01-28

Implement Date: 2026-08-01

Pages: 24 pages

Scope

This document describes the methods of aligning ion beams using inert gas ions in Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) to ensure good depth resolution in sputtering depth profiling and optimal surface cleaning. These methods fall into two categories: one is to use a Faraday cup to measure the ion beam current; the other is an imaging method. Among them, the Faraday cup method also specifies the measurement requirements for the ion beam current density and beam distribution.
This document is applicable to ion guns with a beam spot diameter of less than or equal to 1 mm, but does not include depth resolution optimization.