GB/T 3656-1983
Replaced
GB/T 19444-2025
Active
National standards
GB/T 19444-2025 Test method for oxygen precipition characteristics of silicon wafers—Interstitial oxygen reduction
GB/T 19444-2025 Test method for oxygen precipition characteristics of silicon wafers—Interstitial oxygen reduction
Basic Information
Standard Code:
GB/T 19444-2025
Standard Type:
National standards
Standard Status:
Active
is_force_gb:
no
CCS Name:
\nTest methods for the physical properties of metals
ICS Name:
\nMetal material testing
Publish Date:
2025-06-30
Implement Date:
2026-01-01
Pages:
12 pages
Scope
This document describes a method for testing the oxygen precipitation characteristics of silicon wafers by measuring the reduction in the amount of interstitial oxygen before and after heat treatment of the wafers.
This document is applicable to the testing of oxygen precipitation characteristics of n-type single-crystal silicon wafers with a room-temperature resistivity greater than 0.1 Ω·cm and p-type single-crystal silicon wafers with a room-temperature resistivity greater than 0.5 Ω·cm.
Development Information
Replace the following standards
Referenced Standards
GB/T 1557-2018 Test method for determining interstitial oxygen content in silicon by infrared absorption
GB/T 6682-1992 Water for analytical laboratory use—Specification and test methods
GB/T 6682-2008 Water for analytical laboratory use—Specification and test methods
GB/T 14264-1993 Semiconductor materials—Terms and definitions
GB/T 14264-2009 Semiconductor materials—Terms and definitions
GB/T 14264-2024 Terminology of semiconductor materials
Related Standards
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Replaced
GB/T 3657-1983 Measurement method of direct magnetic properties of soft magnetic alloys
GB/T 3849-1983
Replaced
GB/T 3849-1983 Hardmetals—Rockwell hardness (scale A) test method
GB/T 3850-1983
Replaced
GB/T 3850-1983 Impermeable sintered metal materials and hardmetals—determination of density
GB/T 3851-1983
Replaced
GB/T 3851-1983 Hardmetals—determination of transverse rupture strength
GB/T 4326-1984
Replaced